10 µm process

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The 10 μm process (10 micrometer process) is the level of MOSFET semiconductor process technology that was commercially reached around 1971,[1][2] by companies such as RCA and Intel.

The 10 μm process refers to the minimum size that could be reliably produced: the half-pitch, which is the distance between two 1-metal lanes, center to center, and the gate length of a transistor; those two values used to be identical in early nodes. The smallest transistors and other circuit elements on a chip made with this process were around 10 micrometers wide.

Products featuring 10 μm manufacturing process

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References

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Preceded by
20 μm process
MOSFET semiconductor device fabrication process Succeeded by
6 μm process