Stigmator

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A stigmator is a component of electron microscopes that reduces astigmatism of the beam by imposing a weak electric or magnetic quadrupole field on the electron beam.

Background

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Quadrupole field created by four wires. The principle of a stigmator is that the current through each of the wires would be adjusted to change the shape of the beam.

For early electron microscopes - between the 1940s and 1960s[1] - astigmatism was one of the main performance limiting factors.[2] Sources of this astigmatism include misaligned objectives, non-uniform magnetic fields of the lenses, which was especially hard to correct, lenses that aren't perfectly circular and contamination on the objective aperture.[3][4][5] Therefore, to improve the resolving resolution, the astigmatism had to be corrected.[6] The first commercially used stigmators on electron microscopes were installed in the early 1960s.[1]

The stigmatic correction is done using an electric or magnetic field perpendicular to the beam.[7] By adjusting the magnitude and azimuth of the stigmator field, asymmetric astigmatization can be compensated for.[5] Stigmators produce weak fields compared to the electromagnetic lenses they correct, as usually only minor correction are necessary.[8]


Number of poles

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Stigmators create a quadrupole field, and thus have to consist of at least four poles, but hexapole,[9] octopole and dodecapole stigmatizors are also used, with octopole stigmators being the most common.[10][11] The octopole (or higher order of poles) stigmatizers also produce a quadrupole field, but use their additional poles to align the imposed field with the direction of the stigmatization ellipticity.[3]

Types

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Magnetic stigmator

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The magnetic stigmator is a weak cylindrical lens that can correct the cylindrical component of the beam. It can consist of metal rods which induce a magnetic field, which are inserted with their long axis towards the beam center. By retracting or extending the rods, the astigmatism can be compensated.[12]

Electromagnetic

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Electromagnetic stigmators are stigmators that are integrated with the lenses and directly deform the magnetic field of the lens(es). These were the first types of stigmators to be used.[9][12]

Automatic stigmators

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In most cases, the astigmatism can be corrected using a constant stigmator field which is adjusted by the microscope operator. The main cause of astigmatism, the non-uniform magnetic field produced by the lenses, usually does not change noticeable during a TEM session. A recent development are computer-controlled stigmators, which usually use the Fourier transform of the image to find the ideal stigmator setting. The Fourier transform of an astigmatic image is usually elliptically shaped.[13] For a stigmatic image, it is round, this property can be used by algorithms to reduce the astigmatic aberration.[4]

Multiple stigmator systems

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Normally, one stigmator is sufficient, but TEMs normally contain three stigmators: one to stigmatize the source beam, one to stigmatize real-space images, and one to stigmatize diffraction patterns. These are commonly referred to as condensor, objective, and intermediate (or diffraction) stigmators.[14] The use of three post-sample stigmators is proposed to reduce linear distortion[15]

See also

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  • Anastigmat, a photographic lens completely corrected for the three main optical aberrations

References

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  1. ^ a b Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  2. ^ Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  3. ^ a b Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  4. ^ a b Batten, C. F. (2000). Autofocusing and astigmatism correction in the scanning electron microscope (Doctoral dissertation, Faculty of the Department of Engineering, University of Cambridge).
  5. ^ a b Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  6. ^ Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  7. ^ Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  8. ^ Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  9. ^ a b Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
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  12. ^ a b Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  13. ^ Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  14. ^ Lua error in Module:Citation/CS1/Configuration at line 2172: attempt to index field '?' (a nil value).
  15. ^ Bischoff, M., Henstra, A., Luecken, U., & Tiemeijer, P. C. (2013). U.S. Patent No. 8,569,693. Washington, DC: U.S. Patent and Trademark Office.