File:SALELE at a glance.png

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SALELE_at_a_glance.png (299 × 149 pixels, file size: 2 KB, MIME type: image/png)
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Summary

Description
English: Self-aligned litho-etch-litho-etch (SALELE) involves the use of spacers (grey) to help align trenches (red) patterned after earlier trenches (blue). The trenches are cut at different stages (yellow, purple). [1][2]
Date
Source Own work
Author Guiding light

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References

  1. ↑ SALELE double patterning for 7nm and 5nm nodes
  2. ↑ Y. Drissi et al., Proc. SPIE 10962, 109620V (2019).

Captions

Plan view of SALELE process steps, taken together

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inception

24 March 2021

data size

2,485 byte

height

149 pixel

width

299 pixel

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current01:08, 24 March 2021No thumbnail299 × 149 (2 KB)wikimediacommons>Guiding lightUploaded own work with UploadWizard

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