File:2D Layout Decomposition.png
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Size of this preview: 235 × 598 pixels. Other resolutions: 94 × 240 pixels | 547 × 1,393 pixels.
Original file (547 × 1,393 pixels, file size: 22 KB, MIME type: image/png)
Summary
| Description |
English: A composite target layout (top) is split into two sub-layouts: vertical dense lines (blue) and horizontal sparse and dense lines (red) due to the incompatibility of the illuminations used for each sub-layout,[1] when the dense pitch is less than wavelength divided by numerical aperture. The sparse lines require on-axis illumination, while dense lines require off-axis illumination.[2][3] On the other hand, with off-axis illumination, it is desirable to apply subresolution assist features for the sparse horizontal lines.[4] So the layout splitting allows this due to extra spaces between lines while the original composite doesn't. Furthermore, the tip-to-tip (T2T) features (circled) also need to be controlled well, but are inherently the wrong orientation, requiring the use of additional cut exposures, as it is not possible to fit assist features. |
| Date | |
| Source | Excel drawing |
| Author | Guiding light |
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Licensing
User:Guiding light, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
Transferred from en.wikipedia to Commons using For the Common Good.
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 13:28, 11 September 2018 | 480 × 1,364 (18,271 bytes) | w:en:Guiding light (talk | contribs) | |
| 11:43, 11 September 2018 | 480 × 1,364 (17,502 bytes) | w:en:Guiding light (talk | contribs) | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
References
- ↑ M. Eurlings et al., Proc. SPIE 4404, 266 (2001).
- ↑ J. Bekaert et al., Solid State Tech., Nov. 2007, p. 48.
- ↑ M. van de Kerkhof et al., Proc. SPIE 10143, 101430D (2017).
- ↑ R. J. Socha et al., Proc. SPIE 4000, 1140 (2000).
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 00:32, 5 February 2019 | | 547 × 1,393 (22 KB) | wikimediacommons>Guiding light | Color added, T2T highlighted |
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